Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering

•The RN influences the structure and properties of (AlCrMoTaTi)N coatings.•The alloy coating has a composite structure with amorphous and bcc crystal phases.•The nitride coating displays V-shaped columnar structure with fcc crystal phase.•Increasing RN to 30% caused the hardness to reach maximum val...

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Bibliographic Details
Published in:Applied surface science 2013-10, Vol.282, p.789-797
Main Authors: Tsai, Du-Cheng, Chang, Zue-Chin, Kuo, Bing-Hau, Shiao, Ming-Hua, Chang, Shou-Yi, Shieu, Fuh-Sheng
Format: Article
Language:English
Subjects:
Boundaries
Coating
Coating materials
Columnar structure
Columns (structural)
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Crystal structure
Deposition
Exact sciences and technology
Magnetron sputtering
Nitride materials
Nitrides
Phases
Physics
Transmission electron microscopy (TEM)
Vapor deposition
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Summary:•The RN influences the structure and properties of (AlCrMoTaTi)N coatings.•The alloy coating has a composite structure with amorphous and bcc crystal phases.•The nitride coating displays V-shaped columnar structure with fcc crystal phase.•Increasing RN to 30% caused the hardness to reach maximum values of 30.6GPa.•Electrical resistivity increased to 8212μΩcm when RN increased to 50%. (AlCrMoTaTi)N coatings were deposited on Si substrates via reactive magnetron sputtering. The effects of N2-to-total (N2+Ar) flow ratio (RN) on the coating structure and properties were examined. Alloy coatings have composite equiaxed grain structures consisting of amorphous and body-centered cubic crystal phases, whereas nitride coatings have columnar structures with single face-centered cubic crystal phase. Distinct lattice expansion and grain refinement were observed in nitride coatings as RN increased. Typical V-shaped columnar structures with faceted tops and open column boundaries transformed into denser and smaller columnar structures with domed surfaces. Increasing RN to 30% caused the hardness and modulus to reach maximum values of 30.6 and 291.6GPa, respectively. Electrical resistivity increased from 536μΩcm to 8212μΩcm when RN increased from 10% to 50%.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2013.06.057