Single-stripe tunable laser with chirped sampled gratings fabricated by nanoimprint lithography

The fabrication of diffraction gratings of a chirped sampled gratings distributed reflector (CSG-DR) laser by nanoimprint lithography (NIL) has been demonstrated. The diffraction gratings with highly uniform linewidth and period have been successfully fabricated by the combination of the reverse-ton...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2014, Vol.53 (8S2), p.8-1-08MB05-4
Main Authors: Yoshinaga, Hiroyuki, Yanagisawa, Masaki, Kaneko, Toshimitsu, Akiyama, Kan, Tajima, Mikio, Shoji, Daisei, Fujii, Takuya, Shoji, Hajime
Format: Article
Language:English
Subjects:
Diffraction gratings
Etching
Lasers
Lithography
Nanostructure
Reflectors
Tunable lasers
Tuning
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Summary:The fabrication of diffraction gratings of a chirped sampled gratings distributed reflector (CSG-DR) laser by nanoimprint lithography (NIL) has been demonstrated. The diffraction gratings with highly uniform linewidth and period have been successfully fabricated by the combination of the reverse-tone NIL and precise etching techniques. The CSG-DR laser fabricated by NIL shows a sufficiently wide tuning range of 40 nm as we designed. The results of this study indicate that our fabrication process for the sampled gratings utilizing the NIL technique has a high potential for the fabrication of a CSG-DR laser.
ISSN:0021-4922
1347-4065
1347-4065
DOI:10.7567/JJAP.53.08MB05