Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization

This study demonstrated that a thin ZnO layer functions as a strong adhesion layer between Cu and glass, even when Cu films are formed near room temperature. The adhesion strength was studied with a scratch tester and the films and interfaces were characterized by scanning transmission electron micr...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2013-05, Vol.52 (5), p.05FB04-05FB04-6
Main Authors: Teraoka, Akira, Watanabe, Mitsuhiro, Nabetani, Yoichi, Kondoh, Eiichi
Format: Article
Language:English
Subjects:
ADHESION
ADHESION TESTS
Adhesive strength
Copper
Glass
GLASSES
METALLIZING (FOR PLATING)
Origins
Strength
THIN FILMS
ZINC OXIDE
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Summary:This study demonstrated that a thin ZnO layer functions as a strong adhesion layer between Cu and glass, even when Cu films are formed near room temperature. The adhesion strength was studied with a scratch tester and the films and interfaces were characterized by scanning transmission electron microscopy. The origin of the high adhesion strength was discussed in terms of the presence of an extremely thin (approximately 10 nm) intermixing layer consisting of Cu, Pd, Zn, O, and Si.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.52.05FB04