Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization

This study demonstrated that a thin ZnO layer functions as a strong adhesion layer between Cu and glass, even when Cu films are formed near room temperature. The adhesion strength was studied with a scratch tester and the films and interfaces were characterized by scanning transmission electron micr...

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Published in:Japanese Journal of Applied Physics 2013-05, Vol.52 (5), p.05FB04-05FB04-6
Main Authors: Teraoka, Akira, Watanabe, Mitsuhiro, Nabetani, Yoichi, Kondoh, Eiichi
Format: Article
Language:English
Subjects:
ADHESION
ADHESION TESTS
Adhesive strength
Copper
Glass
GLASSES
METALLIZING (FOR PLATING)
Origins
Strength
THIN FILMS
ZINC OXIDE
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description This study demonstrated that a thin ZnO layer functions as a strong adhesion layer between Cu and glass, even when Cu films are formed near room temperature. The adhesion strength was studied with a scratch tester and the films and interfaces were characterized by scanning transmission electron microscopy. The origin of the high adhesion strength was discussed in terms of the presence of an extremely thin (approximately 10 nm) intermixing layer consisting of Cu, Pd, Zn, O, and Si.
doi_str_mv 10.7567/JJAP.52.05FB04
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source Institute of Physics; Institute of Physics:Jisc Collections:IOP Publishing Read and Publish 2024-2025 (Reading List)
subjects ADHESION
ADHESION TESTS
Adhesive strength
Copper
Glass
GLASSES
METALLIZING (FOR PLATING)
Origins
Strength
THIN FILMS
ZINC OXIDE
title Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
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