Si and Cu ablation with a 46.9-nm laser focused by a toroidal mirror

Si and Cu targets were ablated by a capillary-discharge 46.9-nm pumped laser beam, focused by a toroidal mirror at grazing incidence. The peak power density of the focal spot was ~2 × 10 W/cm . Clear ablation patterns on the surfaces of Si and Cu targets were obtained, with shapes consistent with si...

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Bibliographic Details
Published in:Optics express 2015-06, Vol.23 (11), p.14126-14134
Main Authors: Zhao, Yongpeng, Cui, Huaiyu, Zhang, Wenhong, Li, Wei, Jiang, Shan, Li, Lianbo
Format: Article
Language:English
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Summary:Si and Cu targets were ablated by a capillary-discharge 46.9-nm pumped laser beam, focused by a toroidal mirror at grazing incidence. The peak power density of the focal spot was ~2 × 10 W/cm . Clear ablation patterns on the surfaces of Si and Cu targets were obtained, with shapes consistent with simulations. Ce scintillator (cerium-doped YAG crystal) was used to image the variations of the laser spots. We discuss the shape and damage mechanics of the measured patterns. Melting of the target material was observed in the ablation region on Cu, but not on Si.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.23.014126