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On the determination of the film hardness in hard film/substrate composites using depth-sensing indentation
The main difficulty in the mechanical characterisation of thin films using depth-sensing indentation is the determination of the relative substrate and film contributions to the measured properties of the film/substrate composite. In this study, a three-dimensional numerical simulation of the Vicker...
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Published in: | Ceramics international 2013-08, Vol.39 (6), p.6251-6263 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The main difficulty in the mechanical characterisation of thin films using depth-sensing indentation is the determination of the relative substrate and film contributions to the measured properties of the film/substrate composite. In this study, a three-dimensional numerical simulation of the Vickers hardness test is used to study the influence of the substrate and film mechanical properties on the composite's behaviour under depth-sensing indentation. The particular case of hard films on soft substrates is analysed. In order to understand the behaviour of the composite, a study of the plastic strain distribution under indentation of several composites is performed. A methodology to determine the relative film hardness, i.e. HF/HS ratio, is proposed. The methodology is successfully verified using fictitious and real composite materials. |
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ISSN: | 0272-8842 1873-3956 |
DOI: | 10.1016/j.ceramint.2013.01.046 |