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On the determination of the film hardness in hard film/substrate composites using depth-sensing indentation

The main difficulty in the mechanical characterisation of thin films using depth-sensing indentation is the determination of the relative substrate and film contributions to the measured properties of the film/substrate composite. In this study, a three-dimensional numerical simulation of the Vicker...

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Bibliographic Details
Published in:Ceramics international 2013-08, Vol.39 (6), p.6251-6263
Main Authors: Sakharova, N.A., Oliveira, M.C., Antunes, J.M., Fernandes, J.V.
Format: Article
Language:English
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Summary:The main difficulty in the mechanical characterisation of thin films using depth-sensing indentation is the determination of the relative substrate and film contributions to the measured properties of the film/substrate composite. In this study, a three-dimensional numerical simulation of the Vickers hardness test is used to study the influence of the substrate and film mechanical properties on the composite's behaviour under depth-sensing indentation. The particular case of hard films on soft substrates is analysed. In order to understand the behaviour of the composite, a study of the plastic strain distribution under indentation of several composites is performed. A methodology to determine the relative film hardness, i.e. HF/HS ratio, is proposed. The methodology is successfully verified using fictitious and real composite materials.
ISSN:0272-8842
1873-3956
DOI:10.1016/j.ceramint.2013.01.046