Reuse of Semiconductor Wastewater Using Reverse Osmosis and Metal-Immobilized Catalyst-Based Advanced Oxidation Process

This report describes an efficient hybrid treatment process that recycles semiconductor wastewater by reverse osmosis (RO) and advanced oxidation process (AOP) with metal-immobilized catalysts based on activated carbon. High-loading organic wastewater was pretreated biologically using a membrane bio...

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Bibliographic Details
Published in:Industrial & engineering chemistry research 2014-07, Vol.53 (27), p.11167-11175
Main Authors: Choi, Jeongyun, Chung, Jinwook
Format: Article
Language:English
Subjects:
Catalysis
Catalysts
Electronics
Oxidation
Reverse osmosis
Semiconductors
Waste water
Water quality
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Summary:This report describes an efficient hybrid treatment process that recycles semiconductor wastewater by reverse osmosis (RO) and advanced oxidation process (AOP) with metal-immobilized catalysts based on activated carbon. High-loading organic wastewater was pretreated biologically using a membrane bioreactor, and the remaining organic compounds were filtered by RO and oxidized chemically by AOP. The recycling of the final effluent to ultrapure water (UPW) was evaluated using a pilot-scale UPW production system. AOP with a metal catalyst improved the oxidation of low-molecular-weight organic compounds, such as acetonitrile and acetaldehyde, in electronics wastewater. The pilot-scale RO and AOP with a metal catalyst were performed under optimal conditions and satisfied the water quality standards for UPW. We conclude that the proposed hybrid process is a powerful tool that can be used to recycle electronics wastewater and satisfy the water quality standards for UPW.
ISSN:0888-5885
1520-5045
DOI:10.1021/ie500805x