Development of a PZT MEMS Switch Architecture for Low-Power Digital Applications

A lead zirconate titanate (PZT) microelectromechanical systems (MEMS) digital switch was designed as a low-power low-frequency control system intended to create energy-efficient microcontrollers, control higher voltage systems, and provide integrated control over other MEMS platforms. In addition, t...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2011-08, Vol.20 (4), p.1032-1042
Main Authors: Proie, Robert M., Polcawich, Ronald G., Pulskamp, Jeffrey S., Ivanov, Tony, Zaghloul, Mona E.
Format: Article
Language:English
Subjects:
Actuators
Contact resistance
Devices
digital circuits
Electric potential
Electrodes
Exact sciences and technology
Force
Gold
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
lead zirconate titanate (PZT) ceramics
Lead zirconate titanates
Mathematical models
Mechanical instruments, equipment and techniques
Microelectromechanical systems
Microelectronics
Micromechanical devices and systems
Performance evaluation
Physics
piezoelectric devices
R&D
Research & development
Switches
Voltage
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Summary:A lead zirconate titanate (PZT) microelectromechanical systems (MEMS) digital switch was designed as a low-power low-frequency control system intended to create energy-efficient microcontrollers, control higher voltage systems, and provide integrated control over other MEMS platforms. In addition, the technology is inherently insensitive to high energy radiation and has been shown to operate over a wide range of temperatures. Initial devices were fabricated with three design variables of interest-actuator length, width, and contact metallurgy (Au/Pt, Au/Ru, and Au/Au). To assess the impact of each variable on device performance, device wafers were measured using a SUSS semiautomated probe station and associated control hardware and software. Devices were evaluated based on contact resistance, actuation voltage, minimum actuation voltage using a voltage bias, propagation delay, dynamic power, and static power consumption. The measurements were then analyzed to determine the optimal switch geometry and contact material combination for digital applications. With the data collected, a software model was developed for accurate simulation of higher complexity circuits composed of these switches.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2011.2148160