Electrical scanning probe microscopes to address industrial nano-metrology needs of integrated circuits and nanoelectronic devices

Electrical modes of scanning probe microscopes have found considerable metrology applications in integrated circuits and emerging nano-electronic devices. This paper will review the critical metrology needs that electrical SPMs have addressed in the integrated circuit industry and further applicatio...

Full description

Saved in:
Bibliographic Details
Main Author: Kopanski, Joseph J.
Format: Conference Proceeding
Language:English
Subjects:
Conferences
Devices
III-V semiconductor materials
Integrated circuits
Magnetic force microscopy
Metrology
Microscopes
Microscopy
Microwaves
Nanoscale devices
Nanostructure
Scanning
Scanning probe microscopes
scanning probe microscopy
semiconductor device doping
Semiconductor device measurement
semiconductor-insulator interfaces
semiconductor-metal interfaces
Surface topography
three-dimensional integrated circuits
through silicon vias
Transmission line measurements
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Electrical modes of scanning probe microscopes have found considerable metrology applications in integrated circuits and emerging nano-electronic devices. This paper will review the critical metrology needs that electrical SPMs have addressed in the integrated circuit industry and further applications for the characterization of nano-electronic devices. Solutions to metrology problems addressed by electrical SPM modes including the scanning capacitance microscope (SCM), scanning Kelvin force microscope (SKFM), scanning microwave microscope (SMM), scanning spreading resistance microscope (SSRM), conductive-AFM (c-AFM), and magnetic force microscopy (MFM) will be reviewed.
ISSN:0589-1485
2160-0171
DOI:10.1109/CPEM.2014.6898335