Electron Collision Cross Sections for the BF sub( 3) Molecule and Electron Transport Coefficients in BF sub( 3)-Ar and BF sub( 3)-SiH sub( 4) Mixtures

A consistent set of low-energy electron collision cross sections for the boron trifluoride (BF...) molecule has been derived from the measured electron transport coefficients for a pure BF... molecule using an electron swarm study and a two-term approximation of the Boltzmann equation for energy. Th...

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Bibliographic Details
Published in:Journal of the Physical Society of Japan 2013-03, Vol.82 (3), p.1-1
Main Authors: Hien, Pham Xuan, Jeon, Byung-Hoon, Tuan, Do Anh
Format: Article
Language:English
Subjects:
Collision dynamics
Cross sections
Density
Electric fields
Electron transport
Mathematical analysis
Mathematical models
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Summary:A consistent set of low-energy electron collision cross sections for the boron trifluoride (BF...) molecule has been derived from the measured electron transport coefficients for a pure BF... molecule using an electron swarm study and a two-term approximation of the Boltzmann equation for energy. The electron transport coefficients, which were calculated using the derived set, are consistent with the experimental data over a wide range of E/N values (ratio of the electric field E to the neutral number density N). The present set of electron collision cross sections for the BF3 molecule, therefore, is the best available so far for the quantitative numerical modeling of plasma discharges for processing procedures with materials containing BF... molecules. The electron-transport coefficients for BF...-Ar and BF...-SiH... mixtures were also calculated and analyzed in a wide range of E/N ratios for the first time. The presence of a remarkable synergism in the Townsend first ionization coefficient has been pointed out in BF...-SiH... mixtures. (ProQuest: ... denotes formulae/symbols omitted.)
ISSN:0031-9015
1347-4073