Character and fabrication of Al/Al2O3/Al tunnel junctions for qubit application

The superconductive Josephson junction is the key device for superconducting quantum computation. We have fabricated Al/Al2O3/Al tunnel junctions using a double angle evaporation method based on a suspended shadow mask. The Al2O3 junction barrier has been formed by introducing pure oxygen into the c...

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Bibliographic Details
Published in:Chinese science bulletin 2012-02, Vol.57 (4), p.409-412
Main Authors: Shen, DanDan, Zhu, Ran, Xu, WeiWei, Chang, JunJie, Ji, ZhengMing, Sun, GuoZhu, Cao, ChunHai, Chen, Jian
Format: Article
Language:English
Subjects:
Aluminum
Aluminum oxide
Barriers
Chemistry/Food Science
Devices
Earth Sciences
Engineering
Humanities and Social Sciences
Life Sciences
multidisciplinary
Physics
Qubits (quantum computing)
Resistivity
Science
Science (multidisciplinary)
Superconductors
Tunnel junctions
临界电流密度
制造过程
字符
应用
比特
约瑟夫森结
量子计算
隧道结
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Summary:The superconductive Josephson junction is the key device for superconducting quantum computation. We have fabricated Al/Al2O3/Al tunnel junctions using a double angle evaporation method based on a suspended shadow mask. The Al2O3 junction barrier has been formed by introducing pure oxygen into the chamber during the fabrication process. We have adjusted exposure conditions by changing either the oxygen pressure or the oxidizing time during the formation of tunnel barriers to control the critical current density Jc and the junction specific resistance Re. Measurements of the leakage in Al/Al2O3/Al tunnel junctions show that the devices are suitable for qubit applications.
ISSN:1001-6538
1861-9541
DOI:10.1007/s11434-011-4821-4