Nonadiabatic dynamics in energetic negative fluorine ions scattering from a Si(100) surface

The dependence of the negative-ion fractions on incident energy and angle is reported for 8.5-22.5 keV F(-) ions scattered from a Si(100) surface at a fixed scattering angle of 38°. The negative-ion fraction increases monotonically with incident velocity for specular scattering. In particular, the v...

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Bibliographic Details
Published in:The Journal of chemical physics 2015-09, Vol.143 (11), p.114703-114703
Main Authors: Chen, Lin, Qiu, Shunli, Xiong, Feifei, Lu, Jianjie, Liu, Pinyang, Ding, Bin, Li, Yuan, Cui, Ying, Guo, Yanling, Chen, Ximeng
Format: Article
Language:English
Subjects:
Dependence
Fluorine
Negative ions
Scattering angle
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Summary:The dependence of the negative-ion fractions on incident energy and angle is reported for 8.5-22.5 keV F(-) ions scattered from a Si(100) surface at a fixed scattering angle of 38°. The negative-ion fraction increases monotonically with incident velocity for specular scattering. In particular, the variation of the fraction with incident angle is bell shaped for a given incident energy. We interpret this variation using the incident-velocity effect at short distances where the yield of negative ions depends on the number of initial neutrals. It strongly indicates that at short distances, a dynamical equilibrium population is never achieved. This nonadiabatic feature is supported by simple calculations using modified rate equations.
ISSN:0021-9606
1089-7690
DOI:10.1063/1.4930908