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Nanocomposite carbonaceous-palladium thin films for ammonia sensors
Nanostructural carbonaceous-palladium (C-Pd) films for ammonia sensing were studied. These C-Pd films were prepared in a two-step process: the first one involved physical vacuum deposition (PVD) and the second one chemical vacuum deposition (CVD). The structure and morphology of the obtained films w...
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Published in: | Journal of physics. Conference series 2014-01, Vol.564 (1), p.12004-6 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Nanostructural carbonaceous-palladium (C-Pd) films for ammonia sensing were studied. These C-Pd films were prepared in a two-step process: the first one involved physical vacuum deposition (PVD) and the second one chemical vacuum deposition (CVD). The structure and morphology of the obtained films were characterized with the use of Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM). Measurements of ammonia sensing showed that resistivity of the film changes with ammonia content in ambient atmosphere. |
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ISSN: | 1742-6596 1742-6588 1742-6596 |
DOI: | 10.1088/1742-6596/564/1/012004 |