The interference Linnik type microscope (IM) developed at Inmetro

The interference Linnik type microscope was developed and it design was modernized to provide high resolution nanometrology facility. This microscope can perform length measurement directly relative to wavelength standards such as the frequency stabilized lasers. Thus, one can use interference micro...

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Bibliographic Details
Published in:Journal of physics. Conference series 2015-01, Vol.575 (1), p.12024-5
Main Authors: Malinovski, I, Couceiro, I B, Lima, M S, França, R S, von der Weid, J P
Format: Article
Language:English
Subjects:
Atomic force microscopes
Atomic force microscopy
Calibration
Confocal
Interference
Lasers
Metrology
Microscopes
Modernization
Nanometrology
Physics
Wavelengths
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Description
Summary:The interference Linnik type microscope was developed and it design was modernized to provide high resolution nanometrology facility. This microscope can perform length measurement directly relative to wavelength standards such as the frequency stabilized lasers. Thus, one can use interference microscope for primary calibration of the step heights. These step heights can be used to calibrate vertical axis of the other instruments like optical coherence tomography, atomic force microscope, confocal microscope, etc. In all cases the traceability to the National Institute of Metrology, Quality and Technology length primary standards was attempted to be established.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/575/1/012024