X-ray microanalysis: the state of the art of SDD detectors and WDS systems on scanning electron microscopes (SEM)

Over the past decade, the silicon drift detector energy-dispersive X-ray spectrometry systems (SDD-EDS) have emerged as a major breakthrough in X-ray microanalysis on scanning electron microscopes (SEM). This review covers a description of the SDD device principles and the recent technological devel...

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Bibliographic Details
Published in:IOP conference series. Materials Science and Engineering 2012-01, Vol.32 (1), p.12015-19
Main Authors: Maniguet, L, Robaut, F, Meuris, A, Roussel-Dherbey, F, Chariot, F
Format: Article
Language:English
Subjects:
Detectors
Devices
Electron microscopes
Energy resolution
Microscopes
Scanning electron microscopy
Silicon
Spectrometry
State of the art
System effectiveness
X-rays
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Summary:Over the past decade, the silicon drift detector energy-dispersive X-ray spectrometry systems (SDD-EDS) have emerged as a major breakthrough in X-ray microanalysis on scanning electron microscopes (SEM). This review covers a description of the SDD device principles and the recent technological developments. When high energy resolution or low detection limits are required, WDS detectors remain an effective tool. This review also covers the different WDS systems available on SEMs.
ISSN:1757-899X
1757-8981
1757-899X
DOI:10.1088/1757-899X/32/1/012015