Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at...

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Bibliographic Details
Published in:IOP conference series. Materials Science and Engineering 2014-01, Vol.65 (1), p.12030-6
Main Authors: Al-Shibaany, Zeyad Yousif Abdoon, Hedley, John, Huo, Dehong, Hu, Zhongxu
Format: Article
Language:English
Subjects:
Biosensors
Brittle materials
Lithium
Lithium niobates
Materials science
Micromachining
Piezoelectricity
Profilers
Raman spectroscopy
Rapid prototyping
Roughness
Spindles
Surface properties
Surface roughness
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Summary:Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/65/1/012030