MEMS Batch Fabrication of the Bipolar Micro Magnet Array for Electromagnetic Vibration Harvester

This article introduces a MEMS batch fabrication process of micro magnet array with bipolar magnetic pole for an electromagnetic vibration energy harvester. In order to obtain the large electromotive force from large magnetic flux density change, we established the fine patterned alternating magneti...

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Bibliographic Details
Published in:Journal of physics. Conference series 2014-01, Vol.557 (1), p.12033-5, Article 012033
Main Authors: Yamaguchi, K, Fujita, T, Tanaka, Y, Takehira, N, Sonoda, K, Kanda, K, Maenaka, K
Format: Article
Language:English
Subjects:
Arrays
Bonding
Density
Electric potential
Electromotive forces
Energy harvesting
Flux density
Harvesters
Magnetic flux
Magnetic poles
Magnetic structure
Magnetism
Magnetization
Physics
Vibration
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Summary:This article introduces a MEMS batch fabrication process of micro magnet array with bipolar magnetic pole for an electromagnetic vibration energy harvester. In order to obtain the large electromotive force from large magnetic flux density change, we established the fine patterned alternating magnetized bipolar magnetic structure. The batch fabrication process of bipolar magnet array is composed of two wafers processing with S-pole and N-pole magnetization and bonding process. By the prototype fabrication of bipolar magnet with the 200 μm SN-interval, we showed the usability of the batch fabrication process of the bipolar magnet array. In addition, we estimated the generated power of energy harvester with a bipolar magnet array. Compared to a harvester with monopolar magnet array, we showed the good result for bipolar one.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/557/1/012033