Basic Research of Vibration Energy Harvesting Micro Device using Vinylidene Fluoride / Trifluoroethylene Copolymer Thin Film

Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2...

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Bibliographic Details
Published in:Journal of physics. Conference series 2014-11, Vol.557 (1), p.12030-4
Main Authors: Takiguchi, T, Sasaki, T, Nakajima, T, Yamaura, S, Sekiguchi, T, Shoji, S
Format: Article
Language:English
Subjects:
Copolymers
Devices
Energy harvesting
Film thickness
Fluorides
Physics
Spin coating
Thin films
Vibration
Vinylidene
Vinylidene fluoride
Voltage
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Summary:Basic research of MEMS based micro devices for vibration energy harvesting using vinylidene fluoride / trifluoroethylene (VDF/TrFE) copolymer thin film was investigated. The VDF/TrFE copolymer thin film was formed by spin coating. Thickness of VDF/TrFE copolymer thin film was ranged from 375 nm to 2793 nm. Impedance of VDF/TrFE copolymer thin film was measured by LCR meter. Thin film in each thickness was fully poled by voltage based on C-V characteristics result. Generated power of the devices under applied vibration was observed by an oscilloscope. When the film thickness is 2793 nm, the generated power was about 0.815 μJ.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/557/1/012030