Removal of residual CuO particles on the post CMP wafer surface of multi-layered copper

This article introduces the removal technology of CuO particles on the post CMP wafer surface of multi-layered copper. According to the Cu film corrosion curve with different concentrations of HEO2 and the effect curve of time on the growth rate of CuO film, CuO film with the thickness of 220 nm gro...

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Bibliographic Details
Published in:Journal of semiconductors 2014-04, Vol.35 (4), p.157-164
Main Author: 李炎 孙鸣 牛新环 刘玉岭 何彦刚 李海龙 王傲尘 李洪波
Format: Article
Language:English
Subjects:
Chelating
CLEANING
CMP
Copper
COPPER OXIDE
CORROSION
Corrosion rate
CuO
Residues
SEMICONDUCTORS
Wafers
残余
浓度范围
硅片表面
表面活性剂
铜膜
颗粒
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Summary:This article introduces the removal technology of CuO particles on the post CMP wafer surface of multi-layered copper. According to the Cu film corrosion curve with different concentrations of HEO2 and the effect curve of time on the growth rate of CuO film, CuO film with the thickness of 220 nm grown on Cu a surface was successfully prepared without the interference of CuC12.2H20. Using the static corrosion experiment the type of chelating agent （FA/O II type chelating agent） and the concentration range （10-100 ppm） for CuO removal was determined, and the Cu removal rate was close to zero. The effect of surfactant on the cleaning solution properties was studied, and results indicated that the surfactant has the effect of reducing the surface tension and viscosity of the cleaning solution, and making the cleaning agent more stable. The influence of different concentrations of FA/O I type surfactant and the mixing of FA/O II type chelating agent and FA/O I type surfactant on the CuO removal effect and the film surface state was analyzed. The experimental results indicated that when the concentration of FA/O I type surfactant was 50 ppm, CuO particles were quickly removed, and the surface state was obviously improved. The best removal effect of CuO on the copper wiring film surface was achieved with the cleaning agent ratio of FA/O II type chelating agent 75 ppm and FA/O I type surfactant 50 ppm. Finally, the organic residue on the copper pattern film after cleaning with that cleaning agent was detected, and the results showed that the cleaning used agent did not generate organic residues on the film surface, and effectively removes the organic residue on the water.
ISSN:1674-4926
DOI:10.1088/1674-4926/35/4/046001