A low-noise high-linearity interface ASIC for MEMS gyroscopes

This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes. A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise. In order to cancel the effect caused by the gyroscope capacitive mismatch, a mismatch auto-compensa...

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Bibliographic Details
Published in:Journal of semiconductors 2013-12, Vol.34 (12), p.109-114
Main Author: 方然 鲁文高 王冠男 陶婷婷 张雅聪 陈中建 于敦山
Format: Article
Language:English
Subjects:
Adjustable
Amplification
ASIC
Chips
CMOS工艺
Gain
Gyroscopes
MEMS
Noise
Phase shifters
Semiconductors
低噪声
振动陀螺仪
模拟接口
电荷灵敏放大器
高线性度
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Summary:This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes. A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise. In order to cancel the effect caused by the gyroscope capacitive mismatch, a mismatch auto-compensation circuit is imple- mented. The gain and phase shift of the drive closed loop is controlled separately by an auto gain controller and an adjustable phase shifter. The chip is fabricated in a 0.35 μm CMOS process. The test of the chip is performed with a vibratory gyroscope, and the measurement shows that the noise floor is 0.003°/s√Hz, and the measured drift stability is 43°/h. Within -300 to 300°/s of rotation rate input range, the non-linearity is less than 0.1%.
ISSN:1674-4926
DOI:10.1088/1674-4926/34/12/125009