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Building intuition of iron evolution during solar cell processing through analysis of different process models

An important aspect of Process Simulators for photovoltaics is prediction of defect evolution during device fabrication. Over the last twenty years, these tools have accelerated process optimization, and several Process Simulators for iron, a ubiquitous and deleterious impurity in silicon, have been...

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Published in:Applied physics. A, Materials science & processing Materials science & processing, 2015-09, Vol.120 (4), p.1357-1373
Main Authors: Morishige, Ashley E., Laine, Hannu S., Schön, Jonas, Haarahiltunen, Antti, Hofstetter, Jasmin, del Cañizo, Carlos, Schubert, Martin C., Savin, Hele, Buonassisi, Tonio
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cited_by cdi_FETCH-LOGICAL-c364t-4b423ef8bda45ec1f98198d9bfce52381465868d19b6657f2599fa5aa54169e63
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container_title Applied physics. A, Materials science & processing
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creator Morishige, Ashley E.
Laine, Hannu S.
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Buonassisi, Tonio
description An important aspect of Process Simulators for photovoltaics is prediction of defect evolution during device fabrication. Over the last twenty years, these tools have accelerated process optimization, and several Process Simulators for iron, a ubiquitous and deleterious impurity in silicon, have been developed. The diversity of these tools can make it difficult to build intuition about the physics governing iron behavior during processing. Thus, in one unified software environment and using self-consistent terminology, we combine and describe three of these Simulators. We vary structural defect distribution and iron precipitation equations to create eight distinct Models, which we then use to simulate different stages of processing. We find that the structural defect distribution influences the final interstitial iron concentration ([ Fe i ]) more strongly than the iron precipitation equations. We identify two regimes of iron behavior: (1) diffusivity-limited , in which iron evolution is kinetically limited and bulk [ Fe i ] predictions can vary by an order of magnitude or more, and (2) solubility-limited , in which iron evolution is near thermodynamic equilibrium and the Models yield similar results. This rigorous analysis provides new intuition that can inform Process Simulation, material, and process development, and it enables scientists and engineers to choose an appropriate level of Model complexity based on wafer type and quality, processing conditions, and available computation time.
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subjects Characterization and Evaluation of Materials
Computer simulation
Condensed Matter Physics
Construction
Defects
Evolution
Iron
Machines
Manufacturing
Mathematical analysis
Mathematical models
Nanotechnology
Optical and Electronic Materials
Physics
Physics and Astronomy
Processes
Simulators
Surfaces and Interfaces
Thin Films
title Building intuition of iron evolution during solar cell processing through analysis of different process models
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