Study of Air Temperature Correction for Optical Path Based on Large-Scale Laser Comparator

Large-scale comparators of over 30m range are traceable devices of dimensional measurement in advance large-scale manufacture domain. High precision large-scale laser comparator is an open air laser interferometric measurement device, mainly made up of length measurement system, guiding rail system...

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Bibliographic Details
Published in:Key engineering materials 2014-08, Vol.625, p.85-90
Main Authors: He, Ming Zhao, Huang, Xiao Rong, Li, Jian Shuang, Li, Lian Fu
Format: Article
Language:English
Subjects:
Comparators
Control systems
Hardware
Lasers
Measuring instruments
Optical paths
Temperature compensation
Temperature measurement
Uncertainty
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Summary:Large-scale comparators of over 30m range are traceable devices of dimensional measurement in advance large-scale manufacture domain. High precision large-scale laser comparator is an open air laser interferometric measurement device, mainly made up of length measurement system, guiding rail system and control system. The length measurement system use laser interference system to get displacements, the main source of the measurement uncertainty of displacements comes from the air temperature measurement uncertainty. This paper put forward a novel air temperature compensation method by weighting-section compensation in the large-scale laser comparator optical path. The method can improve the length measurement uncertainty of large-scale laser comparator to 2×10-8 level with changing the hardware of air temperature measurement system.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.625.85