Laser micro-machinability of borosilicate glass surface-modified by electric field-assisted ion-exchange method

In order to improve the laser micro-machinability of borosilicate glass, the glass surface was doped with metal (silver or copper) ions by an electric field-assisted ion-exchange method. Doped ions drifted and diffused into the glass substrate under a DC electric field. The concentration of metal io...

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Bibliographic Details
Published in:Journal of physics. Conference series 2012-08, Vol.379 (1), p.12035-6
Main Authors: Matsusaka, S, Kobayakawa, T, Hidai, H, Morita, N
Format: Article
Language:English
Subjects:
Borosilicate glass
Borosilicate glasses
Constants
Drift
Electric fields
Glass
Glass substrates
Ion exchange
Ions
Lasers
Machinability
Nanostructure
Numerical analysis
Penetration depth
Physics
Silver
Sodium
Ultraviolet lasers
Ultraviolet radiation
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Summary:In order to improve the laser micro-machinability of borosilicate glass, the glass surface was doped with metal (silver or copper) ions by an electric field-assisted ion-exchange method. Doped ions drifted and diffused into the glass substrate under a DC electric field. The concentration of metal ions within the doped area was approximately constant because the ion penetration was caused by substitution between dopant metal and inherent sodium ions. Nanosecond ultraviolet laser irradiation of metal-containing regions produced flat, smooth and defect-free holes. However, the shapes of holes were degraded when the processed hole bottoms reached ion penetration depths. A numerical analysis of ionic drift-diffusion behaviour in glass material under an electric field was also carried out. The calculated results for penetration depth and ionic flux showed good agreement with the measured values.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/379/1/012035