Effect of Undercut on the Characterization of the Mechanical Properties of Silicon Nanocantilevers with Dynamic and Static Test

The elastic mechanical properties of silicon nano-cantilevers are of prime importance in biotechnology and nano-electro-mechanical system (NEMS) applications. In order to make these applications reliable, the exact evaluation of the effect of the undercut on the mechanical properties of silicon nano...

Full description

Saved in:
Bibliographic Details
Published in:Key engineering materials 2015-05, Vol.645-646, p.1072-1077
Main Authors: Zhang, Jia Hong, Gu, Fang, Zhang, Xian Ling, Li, Min, Ge, Yi Xian, Mao, Xiao Li
Format: Article
Language:English
Subjects:
Dynamic mechanical properties
Dynamical systems
Dynamics
Finite element method
Mechanical properties
Nanostructure
Silicon
Static tests
Undercuts
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The elastic mechanical properties of silicon nano-cantilevers are of prime importance in biotechnology and nano-electro-mechanical system (NEMS) applications. In order to make these applications reliable, the exact evaluation of the effect of the undercut on the mechanical properties of silicon nano-cantilevers is essential and critical. In this paper, a numerical-experimental method for determining the effect of the undercut on resonant frequencies and Young's modulus of silicon nano-cantilevers is proposed by combining finite element (FE) analysis and dynamic frequency response tests by using laser Doppler vibrometer (LDV) as well as static force-displacement curve test by using an atomic force microscope (AFM). Silicon nano-cantilevers test structures are fabricated from silicon-on-insulator (SOI) wafers by using the standard complementary metal-oxide-semiconductor (CMOS) lithography process and anisotropic wet-etch release process based on the critical point drying, which inevitably generating the undercut of the nano-cantilever clamping. Our work reveals that the effect of the undercut on the characterization of the mechanical properties of nano-cantilevers with dynamic and static test must be carefully considered.
ISSN:1013-9826
1662-9795
DOI:10.4028/www.scientific.net/KEM.645646.1072