Electrical and magnetic properties of electrodeposited Fe-based alloys used for thin film transformer

Three electrodeposited Fe-Ni,Fe-Co,and Fe-Ni-Co cores of thin film transformer are prepared on silicon（100） substrates,which are sputtered a 90 nm thick film of Cu acting as the seed layer.The core films consisting of Fe-Ni 20：80,Fe-Co 60：40 and Fe-Ni-Co 10：60：30,respectively,are deposited using dir...

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Bibliographic Details
Published in:Science China. Technological sciences 2013, Vol.56 (1), p.84-88
Main Authors: Hou, XiaoWei, Liu, ShiBin, Yang, ShangLin, Li, JuPing, Guo, Bo
Format: Article
Language:English
Subjects:
Alloys
Engineering
Fe基合金
Iron
Magnetic properties
Silicon substrates
SQUID
Superconducting quantum interference devices
Texture
Thin films
Transformers
扫描电子显微镜
电解
硅（100）
磁性质
薄膜变压器
超导量子干涉器件
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Summary:Three electrodeposited Fe-Ni,Fe-Co,and Fe-Ni-Co cores of thin film transformer are prepared on silicon（100） substrates,which are sputtered a 90 nm thick film of Cu acting as the seed layer.The core films consisting of Fe-Ni 20：80,Fe-Co 60：40 and Fe-Ni-Co 10：60：30,respectively,are deposited using direct current electrodeposition.The surface texture,electrical and magnetic properties are surveyed by scanning electron microscopy（SEM）,superconducting quantum interference device（SQUID）,etc.The wave transmission ability and efficiency of thin film transformer with these cores,inputting the sine wave,are compared.All the analyses indicate that FeNi alloy films display the optimal magnetic properties and excellent transformer performance.
ISSN:1674-7321
1869-1900
DOI:10.1007/s11431-012-5039-7