Study on a Planar Interdigitated MEMS Supercapacitor Using Modeling and Simulation Method

In this paper, a modeling and simulation method for planar interdigitated ruthenium oxide MEMS supercapacitor was proposed based on the electrochemical reaction mechanism of supercapacitor. The study simulated the planar interdigitated ruthenium oxide MEMS super capacitor using Comsol software. The...

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Bibliographic Details
Published in:Key engineering materials 2015-05, Vol.645-646, p.513-516
Main Authors: Dai, Ke Ren, Wang, Xiao Feng, Lv, Wu Shuang, You, Zheng
Format: Article
Language:English
Subjects:
Capacitors
Computer programs
Computer simulation
Electric potential
Graphs
Mathematical models
Ruthenium oxide
Simulation
Supercapacitors
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Summary:In this paper, a modeling and simulation method for planar interdigitated ruthenium oxide MEMS supercapacitor was proposed based on the electrochemical reaction mechanism of supercapacitor. The study simulated the planar interdigitated ruthenium oxide MEMS super capacitor using Comsol software. The highly accurate charge and discharge curves of the super capacitor, electric potential distribution graph and the concentration distribution graph were got through simulation. The effects of two structure-parameters were discussed in the research.
ISSN:1013-9826
1662-9795
DOI:10.4028/www.scientific.net/KEM.645646.513