Loading…

Determination of volatile organic compounds in workplace air by multisorbent adsorption/thermal desorption-GC/MS

Investigation of volatile organic compounds (VOCs) was first conducted in the air of class-100 cleanrooms at liquid crystal display (LCD) fabrication facilities. Air samples were collected on multisorbent tubes (including Carbopack B, Carbopack C, and Carbosieve S-III) and analyzed using adsorption/...

Full description

Saved in:
Bibliographic Details
Published in:Chemosphere (Oxford) 2004-07, Vol.56 (1), p.71-80
Main Authors: Wu, Chien-Hou, Feng, Chien-Tai, Lo, Yu-Shiu, Lin, Tsai-Yin, Lo, Jiunn-Guang
Format: Article
Language:English
Subjects:
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Investigation of volatile organic compounds (VOCs) was first conducted in the air of class-100 cleanrooms at liquid crystal display (LCD) fabrication facilities. Air samples were collected on multisorbent tubes (including Carbopack B, Carbopack C, and Carbosieve S-III) and analyzed using adsorption/thermal desorption coupled with gas chromatography–mass spectrometry (GC–MS). Optimal conditions lead to average recoveries in the range of 96.2–98.2%, and method detection limits between 0.38 and 0.78 ppb, under the condition of 1-l sampling volume and 80% relative humidity. The method appears to be accurate, sensitive, simple and well-suited for determining VOC distributions from various stages of LCD manufacturing process and temporal variations of the analyte concentrations. About 15 VOCs were identified in workplace air. The major pollutants such as propylene glycol methyl ether acetate (PGMEA), butyl acetate, and acetone that are commonly used in the opto-electronics industry were detected and accurately quantified with the established method.
ISSN:0045-6535
1879-1298
DOI:10.1016/j.chemosphere.2004.02.003