Preparation and characterization of thick cubic boron nitride films

Cubic boron nitride （c-BN） films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The...

Full description

Saved in:
Bibliographic Details
Published in:Chinese physics B 2014-06, Vol.23 (6), p.462-467
Main Author: 王明娥 马国佳 董闯 巩水利
Format: Article
Language:English
Subjects:
C-BN
c-BN薄膜
Crystal structure
Cubic boron nitride
Deposition
Fourier transforms
Infrared spectroscopy
Interlayers
Magnetron sputtering
Radio frequencies
傅立叶变换红外光谱
制备
射频磁控溅射技术
峰值位移
特性
立方氮化硼薄膜
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Cubic boron nitride （c-BN） films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.
ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/23/6/066805