Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first a...

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Bibliographic Details
Published in:Chinese physics B 2014-02, Vol.23 (2), p.27701-1-027701-5
Main Authors: Qiu, Hua-Cheng, Feili, Dara, Wu, Xue-Zhong, Seidel, Helmut
Format: Article
Language:English
Subjects:
Aluminum
Barometric pressure
Damping
Mathematical analysis
Piezoelectricity
Quality factor
Sensors
Vacuum chambers
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Summary:A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first and the second torsional modes. An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere, using a custom-built vacuum chamber. From the experiment results, it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones. Finally, an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results.
ISSN:1674-1056
1741-4199
DOI:10.1088/1674-1056/23/2/027701