At-wavelength metrology using the X-ray speckle tracking technique: case study of a X-ray compound refractive lens

The X-ray speckle tracking technique has been established on the Test beamline B16 at Diamond and is being used as a valuable tool for at-wavelength metrology. We show here the possibilities and the achievable performances of the X-ray Speckle Tracking technique for optics characterization: the desc...

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Bibliographic Details
Published in:Journal of physics. Conference series 2013-01, Vol.425 (5), p.52020-4
Main Authors: Berujon, S, Wang, H, Sawhney, K J S
Format: Article
Language:English
Subjects:
Case studies
Diamond tools
Diffraction gratings
Interferometers
Lenses
Metrology
Micrometers
Physics
Refractive lenses
Spatial resolution
Tracking
X-rays
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Summary:The X-ray speckle tracking technique has been established on the Test beamline B16 at Diamond and is being used as a valuable tool for at-wavelength metrology. We show here the possibilities and the achievable performances of the X-ray Speckle Tracking technique for optics characterization: the description is illustrated with the case study of the characterization of a compound refractive lens. This optical element was characterized online using the speckle tracking method with nanoradian accuracy and micrometer spatial resolution. For discussion purpose, the results are compared to the ones obtained under similar conditions using a grating interferometer.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/425/5/052020