Fabrication of periodic variable-sized Pt nanoparticles via laser interference patterning

•Periodic variable-sized platinum nanoparticles (PtNPs) were fabricated on the surface of silicon via nanosecond laser interference patterning.•The particle size and size variation display a strong dependence on laser intensity and contrast of laser interference patterning.•The experimental results...

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Bibliographic Details
Published in:Applied surface science 2015-04, Vol.335, p.65-70
Main Authors: Zhou, Zhiqiang, Song, Zhengxun, Li, Li, Zhang, Jinjin, Wang, Zuobin
Format: Article
Language:English
Subjects:
Deposition
Interference
Irradiation
Lasers
Nanoparticles
Nanosecond laser interference patterning
Patterning
Periodic variable-sized PtNPs
Platinum
Platinum nanoparticles
Silicon
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Summary:•Periodic variable-sized platinum nanoparticles (PtNPs) were fabricated on the surface of silicon via nanosecond laser interference patterning.•The particle size and size variation display a strong dependence on laser intensity and contrast of laser interference patterning.•The experimental results show that periodic variable-sized PtNPs can be fabricated in a controllable way via laser interference patterning. This paper presents a method for the fabrication of periodic variable-sized platinum nanoparticles (PtNPs) on the surface of silicon via laser interference patterning (LIP). In the work, a thin Pt film of 50nm thick was previously deposited on the surface of polished silicon by ion sputtering deposition, and it was patterned using two-beam laser interference irradiation. Periodic variable-sized PtNPs were then self-assembled on the local silicon area as the result of the interference irradiation. Significant variation in size can only be obtained in a reasonable laser intensity and interference contrast range. The sizes and size variation of the PtNPs were strongly depended upon laser intensity. The experimental results show that periodic variable-sized PtNPs can be fabricated in a controllable way via LIP.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2015.02.021