27.2 A1.2μg/√Hz-resolution 0.4μg-bias-instability MEMS silicon oscillating accelerometer with CMOS readout circuit

Inertial navigation sets a very stringent requirement on the long-term stability of an accelerometer, which is characterized by bias instability. Long-term stability demands a very low-noise design. Accelerometers based on capacitance sensing are the mainstream MEMS accelerometers reported recently...

Full description

Saved in:
Bibliographic Details
Main Authors: Wang, Xi, Zhao, Jian, Zhao, Yang, Xia, Guo Ming, Qiu, An Ping, Su, Yan, Xu, Yong Ping
Format: Conference Proceeding
Language:English
Subjects:
Accelerometers
Bias
Circuits
CMOS
Frequency measurement
Instability
Microelectromechanical systems
Micromechanical devices
Noise
Resonant frequency
Semiconductor optical amplifiers
Sensors
Silicon
Stability
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Inertial navigation sets a very stringent requirement on the long-term stability of an accelerometer, which is characterized by bias instability. Long-term stability demands a very low-noise design. Accelerometers based on capacitance sensing are the mainstream MEMS accelerometers reported recently [1-3]. The state-of-the-art achieves 1μg bias instability and 2μg/Hz 1/2 resolution with a full scale of ±15g [1]. Compared with capacitive accelerometers, a MEMS silicon oscillating accelerometer (SOA) has the advantage of large input dynamic range and has potential to achieve better performance. So far, only a few SOAs with CMOS readout circuits have been reported. Among them, the best performance metrics achieved are 4μg bias instability and 20μg/Hz 1/2 resolution [4].
ISSN:0193-6530
2376-8606
DOI:10.1109/ISSCC.2015.7063133