Measurements of electron energy probability functions in helicon discharge by laser Thomson scattering

We reported the measurements of electron energy probability functions (EEPFs) in helicon discharge using laser Thomson scattering (LTS). A problematic effect in the measurement, the measured signal intensity in the ICCD camera is influenced by the magnetic field of helicon discharge and measurement...

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Bibliographic Details
Published in:Thin solid films 2013-11, Vol.547, p.52-56
Main Authors: Seo, B.H., You, S.J., Kim, J.H., Seong, D.J., Shin, Y.H., Chang, H.Y.
Format: Article
Language:English
Subjects:
Cameras
Cross-disciplinary physics: materials science
rheology
Data processing
Diagnostic
Discharge
EEPFs
Electric discharges
Electron energy
Exact sciences and technology
Helicon plasmas
Ion and electron beam-assisted deposition
ion plating
Lasers
Magnetic fields
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Thin films
Thomson scattering
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Summary:We reported the measurements of electron energy probability functions (EEPFs) in helicon discharge using laser Thomson scattering (LTS). A problematic effect in the measurement, the measured signal intensity in the ICCD camera is influenced by the magnetic field of helicon discharge and measurement time, was carefully addressed through this paper. To solve this problem, we proposed a data processing method of LTS named as normalization method in this paper with the justification of application to our helicon discharge. The measured EEPFs showed clear Maxwellian distributions at various conditions (magnetic fields and RF powers) in elastic collision range. •Electron energy Probability function in Helicon plasma by Thomson scattering.•Influence of magnetic field and measurement time on ICCD signal.•Normalization method for processing Thomson scattering data.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2013.05.011