Electrophysical and structural properties of the composite quantum wells In sub(0.52)Al sub(0.48)As/In sub(x) Ga sub(1-x)As/In sub(0.52)Al sub(0.48)As with ultrathin InAs inserts

• Published in: Journal of materials research 2015-10, Vol.30 (20), p.3020-3025
• Main Authors: Galiev, Galib Barievich, Vasil'evskii, Ivan Sergeevich, Klimov, Evgeniy Aleksandrovich, Pushkarev, Sergey Sergeevich, Klochkov, Aleksey Nikolaevich, Maltsev, Petr Pavlovich, Presniakov, Mihail Yuryevich, Trunkin, Igor Nikolaevich, Vasiliev, Aleksandr Leonidovich
• Format: Article
• Language: English
• Subjects: Electron mobility; Equivalence; Heterostructures; Indium arsenides; Inserts; Quantum wells; Spreading; Thin films
• ISSN: 0884-2914; 2044-5326
• DOI: 10.1557/jmr.2015.266

The electrophysical and structural properties of InAlAs/InGaAs/InAlAs quantum wells (QWs) with thin InAs inserts were investigated by means of Hall effect measurements and scanning transmission electron microscopy. The analyzed heterostructures are nearly the same ones using for high electron mobility transistors manufacturing except for heavily doped contact top layer. The increase of the electron mobility and concentration in the heterostructures with thin InAs layers in the center of the InGaAs QW as compared with the uniform QW was found and this effect strongly depended on the technological conditions during growth of the InAs inserts. The dependence of the InAs insert structural quality and heterointerface width on the As sub(4) beam equivalent pressure P sub(As) was revealed. The decreased P sub(As) is required for obtaining uniform and smooth InAs inserts as opposed to higher P sub(As) resulting in the interface spreading and lateral composition inhomogeneity of the InAs insert.