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Soft- and reactive landing of ions onto surfaces: Concepts and applications

Soft‐ and reactive landing of mass‐selected ions is gaining attention as a promising approach for the precisely‐controlled preparation of materials on surfaces that are not amenable to deposition using conventional methods. A broad range of ionization sources and mass filters are available that make...

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Bibliographic Details
Published in:Mass spectrometry reviews 2016-05, Vol.35 (3), p.439-479
Main Authors: Johnson, Grant E., Gunaratne, Don, Laskin, Julia
Format: Article
Language:English
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Summary:Soft‐ and reactive landing of mass‐selected ions is gaining attention as a promising approach for the precisely‐controlled preparation of materials on surfaces that are not amenable to deposition using conventional methods. A broad range of ionization sources and mass filters are available that make ion soft‐landing a versatile tool for surface modification using beams of hyperthermal (
ISSN:0277-7037
1098-2787
DOI:10.1002/mas.21451