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Soft- and reactive landing of ions onto surfaces: Concepts and applications
Soft‐ and reactive landing of mass‐selected ions is gaining attention as a promising approach for the precisely‐controlled preparation of materials on surfaces that are not amenable to deposition using conventional methods. A broad range of ionization sources and mass filters are available that make...
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Published in: | Mass spectrometry reviews 2016-05, Vol.35 (3), p.439-479 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Soft‐ and reactive landing of mass‐selected ions is gaining attention as a promising approach for the precisely‐controlled preparation of materials on surfaces that are not amenable to deposition using conventional methods. A broad range of ionization sources and mass filters are available that make ion soft‐landing a versatile tool for surface modification using beams of hyperthermal ( |
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ISSN: | 0277-7037 1098-2787 |
DOI: | 10.1002/mas.21451 |