Analysis of Uncertainties caused by Procedural and Instrumental Interferometry Errors in the Texture and Shape Parameters of a Surface

Results of an analysis of the procedural and instrumental errors that unavoidably arise in measurement of the texture and shape parameters of a surface by means of the methods of three-dimensional interferometry with reference wave front and lateral shift interferometry are presented. It is noted th...

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Bibliographic Details
Published in:Measurement techniques 2013-12, Vol.56 (9), p.1006-1010
Main Authors: Novikov, D. A., Kononogov, S. A., Zolotarevskii, S. Yu, Vishnyakov, G. N., Gusev, A. S., Levin, G. G., Lyaskovskii, V. L.
Format: Article
Language:English
Subjects:
Analytical Chemistry
Approximation
Characterization and Evaluation of Materials
Classification schemes
Error analysis
Errors
Interferometry
International
Interpolation
Lasers
Measurement Science and Instrumentation
Measurement techniques
Physical Chemistry
Physics
Physics and Astronomy
Studies
Surface layer
Texture
Three dimensional
Three dimensional imaging
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Summary:Results of an analysis of the procedural and instrumental errors that unavoidably arise in measurement of the texture and shape parameters of a surface by means of the methods of three-dimensional interferometry with reference wave front and lateral shift interferometry are presented. It is noted that the errors in measurement of the current interference orders are responsible for the greatest contribution to the total procedural error, while the errors associated with measurement of the current coordinates and the shift are negligible. It is shown that the total error of the method of approximate integration is related to the interpolation error and depends on the state of the shape of the surface.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-013-0320-0