Surface nano-texturing of silicon by picosecond laser irradiation through TiO2 nanotube arrays

•Titanium nano tube membrane was explored for laser mask projection to produce sub wavelength structures.•Hierarchical nano structure on silicon was produced in a single step process without use of gas/liquid media.•Results highlight importance of surface plasmon palariton mechanism in formation of...

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Bibliographic Details
Published in:Applied surface science 2015-10, Vol.353, p.1112-1116
Main Authors: Babu, K.E. Sarath Raghavendra, Duraiselvam, Muthukannan
Format: Article
Language:English
Subjects:
Interferometers
Laser arrays
Lasers
LIPSS
Micro/nanostructures
Nanostructure
Scanning electron microscopy
Silicon
Sub-wavelength
Surface structure
TiO2 nanotube arrays
Titanium dioxide
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Summary:•Titanium nano tube membrane was explored for laser mask projection to produce sub wavelength structures.•Hierarchical nano structure on silicon was produced in a single step process without use of gas/liquid media.•Results highlight importance of surface plasmon palariton mechanism in formation of LIPSS.•Also, avoidance of LIPSS is necessary for generation of subwavelength structures by lasers. This article presents, nano-texturing of crystalline silicon by irradiating picosecond laser with variable spatial intensity, caused by optically non-linear TiO2 nanotube arrays (TNTA). Along with micro-scale surface structure, highly ordered laser-induced periodic surface structures (LIPSS) was observed at nano-scale. The periodicity (Λ) of the LIPSS generated was near to the laser wavelength (532nm). Surface morphology at micro-level was characterized by optical microscopy (OM) and white light interferometer (WLI) and at the nano-scale by scanning electron microscope (SEM) and atomic force microscope (AFM). The results highlight the potential use of TNTA as a single step process to produce micro/nanostructures without any gas/liquid medium under ambient condition.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2015.07.015