Fabrication and characterization of nanolayered single element nitride coating

Tantalum nitride (TaN) and Hafnium nitride (HfN) coatings were deposited through magnetron sputtering at various Ar/N2 inlet gas ratios and RF input power control, respectively. The nitrogen contents of the single layer nitride coatings decreased with the Ar/N2 ratio and increased with the input pow...

Full description

Saved in:
Bibliographic Details
Published in:Surface & coatings technology 2015-12, Vol.284, p.112-117
Main Authors: Yang, Y.H., Liu, K.Y., Qiu, Y.X., Wu, C.H., Wu, F.B.
Format: Article
Language:English
Subjects:
Amorphous
Coating
Columnar structure
Crystal structure
Deposition
HfN
Multilayer
Multilayers
Nanostructure
Nitrides
Preferred orientation
TaN
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Tantalum nitride (TaN) and Hafnium nitride (HfN) coatings were deposited through magnetron sputtering at various Ar/N2 inlet gas ratios and RF input power control, respectively. The nitrogen contents of the single layer nitride coatings decreased with the Ar/N2 ratio and increased with the input powers. TaN coating could be fabricated with crystalline structure, c-TaN, with a preferred orientation (200), while the amorphous feature TaN, a-TaN, was deposited with low Ar/N2 ratio and excess N content. For HfN, the similar HfN crystalline features with a preferred orientation (111) were observed for all conditions. The c-TaN and a-TaN layers were alternately stacked into nano-multilayer. The HfN multilayer was deposited with layers generated at 150 and 125W. The c-TaN film exhibited superior mechanical strength, whereas the a-TaN coating had a better corrosion resistance. Combining crystalline and amorphous TaN layers to form a multilayer improved the mechanical behavior. The HfN films, both in single-layer and multi-layer form, exhibited columnar structure feature under various sputtering input powers. Although the multilayer feature for HfN coating by various power input modulation did not exhibit significant improvement for hardness, the scratch resistance was elevated.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2015.08.031