Fabrication and photoluminescence characteristics of In2O3 nanohillocks

Uniformly distributed polycrystalline indium nanohillocks are synthesized on silicon substrates with Au catalyst by using the radio frequency magnetic sputtering technique. The results show that the Au catalyst plays a key role in the formation of indium nanohillocks. After thermally oxidizing the i...

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Bibliographic Details
Published in:Chinese physics B 2011-11, Vol.20 (11), p.519-524
Main Author: 魏合林 张磊 刘祖黎 姚凯伦
Format: Article
Language:English
Subjects:
Catalysts
Gold
Indium
Indium oxides
Nanocomposites
Nanomaterials
Nanostructure
Vacancies
X射线光谱
光致发光光谱
光致发光特性
制备
均匀分布
射频磁控溅射技术
氧化铟
金催化剂
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Summary:Uniformly distributed polycrystalline indium nanohillocks are synthesized on silicon substrates with Au catalyst by using the radio frequency magnetic sputtering technique. The results show that the Au catalyst plays a key role in the formation of indium nanohillocks. After thermally oxidizing the indium nanohillocks at 500 °C in air for 5 h, the indium nanohillocks totally transform into In2O3 nanohillocks. The energy-dispersive X-ray spectroscopy result indicates that many oxygen vacancies and oxygen-indium vacancy pairs exist in the In2O3 nanohillocks. Photoluminescence spectra under an Ne laser excitation at 280 nm show broad emissions at 420 nm and 470 nm with a shoulder at 450 nm related to oxygen vacancies and oxygen-indium vacancies at room temperature.
ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/20/11/118102