Preparation of AZO Nanoparticles, Ceramic Targets and Thin Films by a Co-precipitaition Method

We comprehensively study the co-precipitation preparation of aluminum doped zinc oxide（AZO） nanoparticles, ceramic target and thin fi lm deposition. The nanoparticles calcined below 700 ℃ possessed pure wurtzite structure of ZnO. When the calcination temperature exceeded 700 ℃, ZnAl2O4 phase appeare...

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Bibliographic Details
Published in:Journal of Wuhan University of Technology. Materials science edition 2015-12, Vol.30 (6), p.1134-1139
Main Authors: Xiu, Sanmu, Wei, Tiefeng, Yang, Ye, Zhang, Ting, Li, Jia, Song, Weijie
Format: Article
Language:English
Subjects:
Advanced Materials
Azo
AZO薄膜
Ceramics
Chemistry and Materials Science
Density
Deposition
Electrical resistivity
Materials Science
Nanoparticles
Opacity
Thin films
ZnAl2O4
低电阻率
纳米微粒
纳米颗粒
薄膜沉积
陶瓷靶材
靶制备
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Summary:We comprehensively study the co-precipitation preparation of aluminum doped zinc oxide（AZO） nanoparticles, ceramic target and thin fi lm deposition. The nanoparticles calcined below 700 ℃ possessed pure wurtzite structure of ZnO. When the calcination temperature exceeded 700 ℃, ZnAl2O4 phase appeared. The resistivity and relative density of the AZO target pressed from nanoparticles were 3×10^-3 Ω·cm and 99.1%, respectively. The minimum resistivity of AZO thin films prepared by DC sputtering of the ceramic target reached 4.1×10^-4Ω·cm with the mobility of 33 cm^2/v·s and the carrier concentration of 4.5 ×10^20 cm^-3. The average optical transmittance of the AZO thin films in the visible wavelength range（400-800 nm） was more than 80%.
ISSN:1000-2413
1993-0437
DOI:10.1007/s11595-015-1284-5