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Nanogradient all-dielectric films: technology of fabrication and the first experiments

The technology of fabrication of gradient dielectric nanofilms with the predesigned distribution of refractive index by means of magnetron sputtering of the nanofilm components on the movable substrate, based on the prescribed motion of substrate, is presented. The theoretical prediction of giant co...

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Bibliographic Details
Published in:Optical materials express 2014-11, Vol.4 (11), p.2250-2261
Main Authors: Shvartsburg, A.B., Obod, Yu.A., Kuzmichev, A.I., Volpian, O.D., Parkhomenko, Yu.N.
Format: Article
Language:English
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Summary:The technology of fabrication of gradient dielectric nanofilms with the predesigned distribution of refractive index by means of magnetron sputtering of the nanofilm components on the movable substrate, based on the prescribed motion of substrate, is presented. The theoretical prediction of giant controllable heterogeneity-induced dispersion of gradient dielectric periodical nanostructures without free carriers is verified by the experimental measurements of their transmittance in visible and near infrared spectral ranges. The unusual transmittance spectra of these structures are distinguished by strong dispersion nearby the red edge of visible range and almost constant high transmittance in the near infrared range. Method of non-destroying control of gradient optical nanolayers, using the X-ray reflectometry of their density distribution, is developed, and the possibility of formation of nanocluster structures of these layers is shown. Potential of periodical gradient all-dielectric nanostructures for flexible design and fabrication of broadband antireflection coatings with sub-wavelength thicknesses is considered.
ISSN:2159-3930
2159-3930
DOI:10.1364/OME.4.002250