Mechanical and Tribological Properties of HiPIMS and HiTUS W-C Based Coatings

Several series of W-C based coatings were deposited by HiPIMS and HiTUS deposition technologies with different deposition parameters (power, frequency and pulse length in HiPIMS and pressure, acetylene content and RF bias in HiTUS). To investigate their effect on the hardness and tribological proper...

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Published in:Key Engineering Materials 2015-09, Vol.662, p.99-102
Main Authors: Podoba, Rudolf, Kvetková, Lenka, Ferdinandy, Milan, Lofaj, František, Hviščová, Petra, Novák, Michal
Format: Article
Language:English
Subjects:
Acetylene
Bias
Coatings
Deposition
Hardness
Tribology
Tungsten carbide
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description Several series of W-C based coatings were deposited by HiPIMS and HiTUS deposition technologies with different deposition parameters (power, frequency and pulse length in HiPIMS and pressure, acetylene content and RF bias in HiTUS). To investigate their effect on the hardness and tribological properties. The hardness of HiTUS coatings was up to 36 GPa and CoFs of these coatings were around 0.5, whereas the HiPIMS coatings exhibited lower hardness (18 – 20 GPa) but also lower CoFs (0.18 - 0.2).
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subjects Acetylene
Bias
Coatings
Deposition
Hardness
Tribology
Tungsten carbide
title Mechanical and Tribological Properties of HiPIMS and HiTUS W-C Based Coatings
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