Formation of ion beam with high current density for micro irradiation techniques

The paper describes a study of the ion beam formation for irradiation of microareas of construction materials with individual grains. A numerical simulation of the microbeam formation was performed with profiles of current density distribution close to rectangular to obtain uniform dose. Ion beams w...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2015-04, Vol.348, p.115-118
Main Authors: Romanenko, A.V., Ponomarev, A.G.
Format: Article
Language:English
Subjects:
Beams (radiation)
Current density
Density
Focusing
Formations
Ion beams
Irradiation
Microbeams
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Summary:The paper describes a study of the ion beam formation for irradiation of microareas of construction materials with individual grains. A numerical simulation of the microbeam formation was performed with profiles of current density distribution close to rectangular to obtain uniform dose. Ion beams with the total current on the target 10-100nA were considered. An approach for beam focusing with energy variation without moving a sample was considered. The ability to create current density distributions close to uniform in the target plane was experimentally validated.
ISSN:0168-583X
DOI:10.1016/j.nimb.2015.01.073