Computer simulation of RBS spectra from samples with surface roughness

A fast code for the simulation of common RBS spectra including surface roughness effects has been written and tested on virtual samples comprising either a rough layer deposited on a smooth substrate or smooth layer deposited on a rough substrate and simulated at different geometries. The sample sur...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2016-03, Vol.371, p.101-105
Main Authors: Malinský, P., Hnatowicz, V., Macková, A.
Format: Article
Language:English
Subjects:
Computer simulation
Deposition
Ion beams
Particle trajectories
Roughness
Rutherford backscattering
Spectra
Substrates
Surface roughness
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Summary:A fast code for the simulation of common RBS spectra including surface roughness effects has been written and tested on virtual samples comprising either a rough layer deposited on a smooth substrate or smooth layer deposited on a rough substrate and simulated at different geometries. The sample surface or interface relief has been described by a polyline and the simulated RBS spectrum has been obtained as the sum of many particular spectra from randomly chosen particle trajectories. The code includes several procedures generating virtual samples with random and regular (periodical) roughness. The shape of the RBS spectra has been found to change strongly with increasing sample roughness and an increasing angle of the incoming ion beam.
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2015.10.001