Effect of magnetic quadrupole lens alignment on a nuclear microprobe resolution

The paper reports the research trends in developing probe-forming systems with high demagnification and analysis factors that limit a nuclear microprobe resolution. Parasitic aberrations caused by tilts and offsets of magnetic quadrupoles are studied in terms of their effect on probe parameters on a...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2016-04, Vol.373, p.110-116
Main Authors: Kolinko, S.V., Ponomarev, A.G.
Format: Article
Language:English
Subjects:
Aberration
Alignment
Camber
Guidelines
Lenses
Nuclear microprobe resolution
Probe-forming system
Quadrupole lens positioning
Quadrupoles
Tilt
Trends
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Summary:The paper reports the research trends in developing probe-forming systems with high demagnification and analysis factors that limit a nuclear microprobe resolution. Parasitic aberrations caused by tilts and offsets of magnetic quadrupoles are studied in terms of their effect on probe parameters on a target. The most common arrangements of probe-forming systems such as a triplet and “Russian quadruplet” with separated geometry are considered. The accuracy prerequisites for the positioning of the quadrupoles are defined, and practical guidelines for alignment of probe-forming systems with high demagnification factors are suggested.
ISSN:0168-583X
1872-9584
DOI:10.1016/j.nimb.2016.03.009