Novel silicon photomultiplier with high fill factor

We report the successful fabrication of a new silicon photomultiplier (SiPM) with the highest fill factor achieved to date. By utilizing a novel trench structure, a SiPM of 0.5 × 0.5 mm2 was designed and fabricated. The device consisted of 1024 micropixels, and a 70% fill factor was achieved for eac...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 2015-06, Vol.54 (6), p.62201
Main Authors: Lee, Hye Young, Jeon, Jin-A, Park, Il H, Lee, Jik
Format: Article
Language:English
Subjects:
Devices
Gain
Imaging
Multiplier phototubes
Photomultipliers
Photons
Silicon
Wavelengths
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We report the successful fabrication of a new silicon photomultiplier (SiPM) with the highest fill factor achieved to date. By utilizing a novel trench structure, a SiPM of 0.5 × 0.5 mm2 was designed and fabricated. The device consisted of 1024 micropixels, and a 70% fill factor was achieved for each of the 15 × 15 µm2 micropixels. The fabricated SiPM showed the desired characteristics for a fast photomultiplying device, namely, a rise time of ∼2 ns, a gain of 1 × 105-5 × 105, and a photon detection efficiency of ∼10% at the 470 nm wavelength. The details of the design, fabrication, and performance characteristics are presented together with the implications for the future development of SiPM-based imaging sensors.
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.54.062201