Implementing Transmission Electron Backscatter Diffraction for Atom Probe Tomography

There are advantages to performing transmission electron backscattering diffraction (tEBSD) in conjunction with focused ion beam-based specimen preparation for atom probe tomography (APT). Although tEBSD allows users to identify the position and character of grain boundaries, which can then be combi...

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Bibliographic Details
Published in:Microscopy and microanalysis 2016-06, Vol.22 (3), p.583-588
Main Authors: Rice, Katherine P., Chen, Yimeng, Prosa, Ty J., Larson, David J.
Format: Article
Language:English
Subjects:
Boundaries
Cameras
Discount coupons
Electrons
Ion beams
Microscopy
Software
Specimen preparation
Technique and Instrumentation Development
Tomography
Trace elements
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Summary:There are advantages to performing transmission electron backscattering diffraction (tEBSD) in conjunction with focused ion beam-based specimen preparation for atom probe tomography (APT). Although tEBSD allows users to identify the position and character of grain boundaries, which can then be combined with APT to provide full chemical and orientation characterization of grain boundaries, tEBSD can also provide imaging information that improves the APT specimen preparation process by insuring proper placement of the targeted grain boundary within an APT specimen. In this report we discuss sample tilt angles, ion beam milling energies, and other considerations to optimize Kikuchi diffraction pattern quality for the APT specimen geometry. Coordinated specimen preparation and analysis of a grain boundary in a Ni-based Inconel 600 alloy is used to illustrate the approach revealing a 50° misorientation and trace element segregation to the grain boundary.
ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927616011296