Probing properties of cold radiofrequency plasma with polymer probe

The probe intended for the characterization of cold plasma is introduced. The probe allows the estimation of Debye length of cold plasma. The probe is based on the pronounced modification of surface properties (wettability) of polymer films by cold plasmas. The probe was tested with the cold radiofr...

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Bibliographic Details
Published in:Journal of plasma physics 2015-01, Vol.81 (1), p.np-np, Article 905810105
Main Authors: Bormashenko, E., Chaniel, G., Multanen, V.
Format: Article
Language:English
Subjects:
Air plasma
Chambers
Cold plasmas
Debye length
Discharge
Plasma physics
Polymers
Radiofrequency
Sensors
Surface properties
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Summary:The probe intended for the characterization of cold plasma is introduced. The probe allows the estimation of Debye length of cold plasma. The probe is based on the pronounced modification of surface properties (wettability) of polymer films by cold plasmas. The probe was tested with the cold radiofrequency inductive air plasma discharge. The Debye length and the concentration of charge carriers were estimated for various gas pressures. The reported results coincide reasonably with the corresponding values established by other methods. The probe makes possible measurement of characteristics of cold plasmas in closed chambers.
ISSN:0022-3778
1469-7807
DOI:10.1017/S0022377814000385