Enabling high solubility of ZnO in TiO sub(2) by nanolamination of atomic layer deposition

Zn-doped TiO sub(2) nanotubes were fabricated by nanolaminated packing of alternating layers of TiO sub(2) and ZnO by atomic layer deposition (ALD) using a polycarbonate (PC) membrane as a template. With 400 cycles of ALD, the nanotubes with a thickness of 28 nm and an outer diameter of 220 nm were...

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Bibliographic Details
Published in:Nanoscale 2015-11, Vol.7 (45), p.19222-19230
Main Authors: Su, C-Y, Wang, C-C, Hsueh, Y-C, Gurylev, V, Kei, C-C, Perng, T-P
Format: Article
Language:English
Subjects:
Atomic layer deposition
Cycle ratio
Nanostructure
Nanotubes
Polycarbonates
Solubility
Titanium dioxide
Zinc oxide
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Summary:Zn-doped TiO sub(2) nanotubes were fabricated by nanolaminated packing of alternating layers of TiO sub(2) and ZnO by atomic layer deposition (ALD) using a polycarbonate (PC) membrane as a template. With 400 cycles of ALD, the nanotubes with a thickness of 28 nm and an outer diameter of 220 nm were obtained after removing the PC membrane by annealing at 450 degree C. The doping concentration of ZnO in TiO sub(2) depends on the precursor cycle ratio of ZnO to TiO sub(2). With the precursor cycle ratio of ZnO : TiO sub(2) at 0.04, a uniform bulk solubility of similar to 8 at% is obtained, and the surface concentration of Zn is even higher, similar to 16 at%. From the depth profiles measured by secondary ion mass spectrometry, Zn is uniformly distributed across the thickness, which is further confirmed by analyses of X-ray photoelectron spectroscopy, X-ray diffraction, and Raman spectroscopy. Additionally, from the transmission electron microscopic observation, the highly doped anatase TiO sub(2) exhibits some regions of severe deformation that results in localized solid-state amorphization.
ISSN:2040-3364
2040-3372
DOI:10.1039/c5nr06264k