A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures

Dynamic errors of the stylus-based probing system seriously affect the measurement accuracy in surface quality detection on microstructures. A method, which is focused on measuring the surface form of microgears, microholes on the injector nozzle, and so forth, is proposed to control dynamic errors...

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Bibliographic Details
Published in:Journal of nanomaterials 2016-01, Vol.2016 (2016), p.1-8
Main Authors: Zhao, Shiping, Yin, Deqiang, Xu, Bin, Fang, Hui
Format: Article
Language:English
Subjects:
Accuracy
Control surfaces
Dynamical systems
Dynamics
Efficiency
Error analysis
Errors
Mathematical models
Microstructure
Nanomaterials
Styli
Test systems
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Summary:Dynamic errors of the stylus-based probing system seriously affect the measurement accuracy in surface quality detection on microstructures. A method, which is focused on measuring the surface form of microgears, microholes on the injector nozzle, and so forth, is proposed to control dynamic errors of the stylus-based probing system. Firstly, two kinematical models were built to systematically investigate the dynamic performance of the stylus-based probing system, and the relationship between the measuring force, scanning speed, fidelity, and dynamic errors was described. Then, numerical simulations of the surface form measurement, in which a sine-shaped microstructure was taken as a target surface, were carried out. Results of the numerical simulations reveal that the dynamic errors were affected by the scanning speed and the initial position of the measured specimen. Lastly, a method to control dynamic errors by properly setting up the scanning speed and the initial position of the specimen was proposed for the surface form measurement of microstructures.
ISSN:1687-4110
1687-4129
DOI:10.1155/2016/3727514